JPH0646076Y2 - 加熱ヒータ - Google Patents
加熱ヒータInfo
- Publication number
- JPH0646076Y2 JPH0646076Y2 JP11879689U JP11879689U JPH0646076Y2 JP H0646076 Y2 JPH0646076 Y2 JP H0646076Y2 JP 11879689 U JP11879689 U JP 11879689U JP 11879689 U JP11879689 U JP 11879689U JP H0646076 Y2 JPH0646076 Y2 JP H0646076Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heating plate
- plate
- groove
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 66
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 230000017525 heat dissipation Effects 0.000 claims description 17
- 239000000945 filler Substances 0.000 claims description 9
- 230000000630 rising effect Effects 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 3
- 238000009751 slip forming Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- 239000011800 void material Substances 0.000 description 4
- 238000005219 brazing Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879689U JPH0646076Y2 (ja) | 1989-10-12 | 1989-10-12 | 加熱ヒータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879689U JPH0646076Y2 (ja) | 1989-10-12 | 1989-10-12 | 加熱ヒータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0357894U JPH0357894U (en]) | 1991-06-04 |
| JPH0646076Y2 true JPH0646076Y2 (ja) | 1994-11-24 |
Family
ID=31666946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11879689U Expired - Lifetime JPH0646076Y2 (ja) | 1989-10-12 | 1989-10-12 | 加熱ヒータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0646076Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7671850B2 (ja) * | 2021-07-20 | 2025-05-02 | 京セラ株式会社 | 加熱装置 |
-
1989
- 1989-10-12 JP JP11879689U patent/JPH0646076Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0357894U (en]) | 1991-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |